Pilot Superconductor Manufacturing Facility

• Size:
  • 4,500 sq. ft.
• Location:
  • UH Technology Bridge – Building 14A

  Semiconductor Device Fabrication Laboratory

• Size:
  • 13,000 sq. ft.
• Location:
  • UH Technology Bridge – Building 15
• Features:
  • Class 1000 cleanroom
  • Device fabrication area -Metrology area
  • Safely handles several toxic and pyrophoric gases (used in metal organic chemical vapor deposition and plasma enhanced chemical vapor deposition processes
  • Low pressure gas cylinders (used for safer arsine, phosphine and germane delivery)
  • Highly trained staff to assist with projects and equipment usage